Ebara 50x20 Dry Vacuum Pump
Quoted on requestWorking & warranted
- Condition
- Used See details
- Brand
- Ebara
- MPN
- 50X20
- SKU
- 2412
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Method, cost and timing confirmed on your quote. Shipping policy
- Lead Time:
- We’ll confirm exact timing when we send your quote.
- Sale Coverage:
- Working & Warranted: 90-day warranty. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
Designed for operation in harsh applications such as
LPCVD, PECVD, CVD and metal etch.
Water cooling manifold w/3/8" NPT connections
N2 purge system w/pressure regulator and flow meter
Fore pump: 3 HP
Rear pump: 2 HP
No controls or motor starters included
Technical specifications
| Dry Pump | YES |
| Pumping Speed | 127.0 CFM (3,588.7 l/m) |
| Ultimate Pressure | 0.40E-2(En) torr (0.53E-2 mbar) |
| Inlet Flange | KF 50.0 mm (1.969 in) |
| Exhaust Flange | KF 40.0 mm (1.575 in) |
| Duty--Service | Corrosive |
| Two-Stage | YES |
| Direct Drive | Yes |
| Rotational Speed | 3,460 RPM |
| Year of Manufacture | 1996 |
| Power Requirements | 208/240 V 19.0 A 50/60 Hz 3 Phase |
| Weight | 722 lb (327 kg) |
Exterior Dimensions
| Width | 30.000 in (76.2 cm) |
| Depth | 18.000 in (45.7 cm) |
| Height | 38.000 in (96.5 cm) |
Condition & testing notes
Previously in service and offered for secondary-market resale.
