Family-Owned & Operated Since 1987

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Capovani Brothers Inc.

Ebara Technologies 40X20 Dry Vacuum Pump

Quoted on requestWorking & warranted

Condition: Used
Brand: Ebara
MPN: 40X20
SKU: 3569
Availability: 1 in stock

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Item description

Water cooled

Designed for operation in harsh applications such as

LPCVD, PECVD, CVD and metal etch.

Water cooling manifold w/3/8" NPT connections

N2 purge system w/pressure regulator and flow meter

No motor starters or controls included

Specifications

Dry Pump: YES
Pumping Speed: 42.0 CFM (1,186.8 l/m)
Ultimate Pressure: 0.30E-1(En) torr (0.40E-1 mbar)
Inlet Flange: KF 40.0 mm (1.575 in)
Exhaust Flange: KF 40.0 mm (1.575 in)
Duty--Service: Corrosive
Rotational Speed: 2,880 RPM
Oil Type: Fomblin TM
Power Requirements: 220 V 12.2 A 50/60 Hz 3 Phase
Weight: 426 lb (193 kg)

Exterior Dimensions

Width: 16.000 in (40.6 cm)
Depth: 32.000 in (81.3 cm)
Height: 22.000 in (55.9 cm)

Working & Warranted
Working & Warranted means the item has been inspected by Capovani engineers to confirm functional condition and is sold with a 90 day warranty.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Secure, flexible payment
Card and invoice payments through Stripe, plus purchase orders and offline payment options.

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