Ebara Technologies 40X20 Dry Vacuum Pump
Quoted on requestWorking & warranted
- Condition
- Used See details
- Brand
- Ebara
- MPN
- 40X20
- SKU
- 3569
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Method, cost and timing confirmed on your quote. Shipping policy
- Lead Time:
- We’ll confirm exact timing when we send your quote.
- Sale Coverage:
- Working & Warranted: 90-day warranty. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
Water cooled
Designed for operation in harsh applications such as
LPCVD, PECVD, CVD and metal etch.
Water cooling manifold w/3/8" NPT connections
N2 purge system w/pressure regulator and flow meter
No motor starters or controls included
Technical specifications
| Dry Pump | YES |
| Pumping Speed | 42.0 CFM (1,186.8 l/m) |
| Ultimate Pressure | 0.30E-1(En) torr (0.40E-1 mbar) |
| Inlet Flange | KF 40.0 mm (1.575 in) |
| Exhaust Flange | KF 40.0 mm (1.575 in) |
| Duty--Service | Corrosive |
| Rotational Speed | 2,880 RPM |
| Oil Type | Fomblin TM |
| Power Requirements | 220 V 12.2 A 50/60 Hz 3 Phase |
| Weight | 426 lb (193 kg) |
Exterior Dimensions
| Width | 16.000 in (40.6 cm) |
| Depth | 32.000 in (81.3 cm) |
| Height | 22.000 in (55.9 cm) |
Condition & testing notes
Previously in service and offered for secondary-market resale.
