Used Surface Technology Systems (STS) AMC1A Automatic RF Matching Control Module removed from an STS MXP Multiplex ICP ASE HR Silicon Etcher.
The AMC1A is part of the automatic RF matching system used on STS Multiplex ICP processing equipment. Multiplex ICP systems utilize AMC modules in conjunction with the RF matching networks associated with the ICP coil and platen RF systems.
This is a proprietary Surface Technology Systems component intended for STS / SPTS Multiplex semiconductor processing equipment.
Condition: Used. Removed from decommissioned working equipment. Not independently tested after removal.
PLEASE NOTE: This listing is for the item described in the title and description only. Other modules, components, equipment, or accessories visible in the photographs are shown for reference and are not included in the sale.
