Description:
Used Surface Technology Systems (STS) ILD4 electronics module removed from an STS MXP Multiplex ICP ASE HR Silicon Etcher.
The ILD4 is a proprietary OEM Surface Technology Systems electronics module used in STS semiconductor processing equipment. Replacement-parts references identify the ILD4 under SPTS part / assembly number AS310682.01.
This unit may be useful as a replacement, repair or service spare for compatible Surface Technology Systems / SPTS semiconductor processing equipment.
Condition: Used. Removed from decommissioned equipment. Not independently tested after removal.
PLEASE NOTE: This listing is for the item described in the title and description only. Other modules, components, equipment, or accessories visible in the photographs are shown for reference and are not included in the sale.
