Used Surface Technology Systems (STS) VAC3Y Vacuum Control Module removed from an STS MXP Multiplex ICP ASE HR Silicon Etcher.
The VAC3Y is an OEM STS electronics module used as part of the Multiplex process chamber vacuum control system. STS VAC-series controls are associated with chamber pumping, venting and process pressure control.
This is a proprietary Surface Technology Systems component and may be useful as a replacement or service spare for installed STS / SPTS Multiplex semiconductor processing equipment.
Condition: Used. Removed from decommissioned equipment. Not independently tested after removal.
PLEASE NOTE: This listing is for the item described in the title and description only. Other modules, components, equipment, or accessories visible in the photographs are shown for reference and are not included in the sale.
