Industrial Physical Vapor Deposition Tools

  1. CHA SEC 1000 RAP ELECTRON BEAM EVAPORATOR

    Electron Beam Evaporators

    CHA SEC 1000 RAP ELECTRON BEAM EVAPORATOR

    Six Pocket Ebeam Gun, (2)Resistance Sources, 6kW Heater Array, 25.5" Bell Jar, Cryo PumpedThe CHA SEC-1000-RAP high-vacuum EBeam deposition system designed for use in production and research environments.

  2. VARIAN 3190 SPUTTER SYSTEM

    Standalone Sputterers

    VARIAN 3190 SPUTTER SYSTEM

    Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter Currently configured for 100mm wafers3 Target mini-quantumsRF EtchVIPS (Vacuum Isolated Processing Station)Residual Gas Analyzer

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