Surface Tech Sys MXP Multiplex ICP ASE HR Etcher
Quoted on requestWorking & warranted
- Condition
- Used See details
- Brand
- Surface Tech Sys
- MPN
- MXP Multiplex ICP ASE HR
- SKU
- 102178
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Method, cost and timing confirmed on your quote. Shipping policy
- Lead Time:
- We’ll confirm exact timing when we send your quote.
- Sale Coverage:
- Working & Warranted: 90-day warranty. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
ICP V2 - Balun coil
Mechanical Clamp
Helium Backside Cooling
Carousel in MkIV MPX - 2 x 150mm wafers
3KW Source
300/30W platen
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2
Windows 2000
Bosch license
Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase
Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase.
Technical specifications
| Process | Silicon Etch Bosch Process |
| High Vacuum Pump | Pfeiffer MAG 2000 |
| Roughing Pump | Edwards IQMB250 & IQDP80 |
| RF Generator Model | ENI/ACG-3B and Advanced Energy RFG 3001 |
| Number of Gas Inputs | Four Gas |
| Process Gases | SF6, C4F8, O2, Ar |
| CE Marked | YES |
| Year of Manufacture | 2003 |
Wafer Size Range
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
Loadlock
| Loadlock Yes/No | YES |
| Loadlock Pump Manufacturer & Model | Edwards E2M40 |
Chillers
| Number of Chillers | 1 |
| Chiller #1Manufacturer/Model | Huber/Unistat 140W |
Condition & testing notes
Previously in service and offered for secondary-market resale.
