SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER
Silicon Etchers
Silicon Etcher - Year 2003
1 unit @ Best Price
Make: Surface Tech Sys
Model: MXP Multiplex ICP ASE HR
Item ID: 102178
| Manufacturer | Surface Tech Sys |
| Model | MXP Multiplex ICP ASE HR |
| Wafer Size Range | |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Process | Silicon Etch Bosch Process |
| Loadlock | |
| Loadlock Yes/No | YES |
| Loadlock Pump Manufacturer & Model | Edwards E2M40 |
| High Vacuum Pump | Pfeiffer MAG 2000 |
| Roughing Pump | Edwards IQMB250 & IQDP80 |
| RF Generator Model | ENI/ACG-3B and Advanced Energy RFG 3001 |
| Number of Gas Inputs | Four Gas |
| Process Gases | SF6, C4F8, O2, Ar |
| Chillers | |
| Number of Chillers | 1 |
| Chiller #1Manufacturer/Model | Huber/Unistat 140W |
| Accessories | ICP V2 - Balun coil
|
| Other Information | Windows 2000 |
| CE Marked | YES |
| Year of Manufacture | 2003 |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.